Thermal Stability of Magnetron Sputtered Low Hydrogen
Content Diamondlike Carbon
CHENG Degang, LÜ Fanxiu, SUN Qinbiao, YU Wenxiu, YANG Rang
Department of Materials Science and Engineering, Beijing University of Science and Technology, Beijing 100083
Thermal Stability of Magnetron Sputtered Low Hydrogen
Content Diamondlike Carbon
CHENG Degang;LÜ Fanxiu;SUN Qinbiao;YU Wenxiu;YANG Rang
Department of Materials Science and Engineering, Beijing University of Science and Technology, Beijing 100083
关键词 ：
68.60.Dv ,
78.66.-w
Abstract ： Response to vacuum annealing at temperatures up to 600°C for 3h for low hydrogen content diamondlike carbon (LHDLC) films prepared by magnetron sputtering of pure graphite in pure Ar atmosphere has been studied. Optical properties of the as-deposited and annealed films have been characterized by ellipsometry and infrared spectroscopy. No change was found for the films annealed at up to 400°C. The LHDLC begins losing hydrogen after annealing above 400°C and the sp2 hybrid structure increases. The refractive index of the films increases with increasing annealing temperatures above 500°C. Annealing at 600°C results in graphitization and the loss of IR transparency.
Key words ：
68.60.Dv
78.66.-w
出版日期: 1994-05-01
:
68.60.Dv
(Thermal stability; thermal effects)
78.66.-w
(Optical properties of specific thin films)
引用本文:
CHENG Degang;LÜFanxiu;SUN Qinbiao;YU Wenxiu;YANG Rang. Thermal Stability of Magnetron Sputtered Low Hydrogen
Content Diamondlike Carbon
[J]. 中国物理快报, 1994, 11(5): 285-288.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1994/V11/I5/285
[1]
SUN Xi-Lian;SHAO Jian-Da. Effect of Alumina and Chromium Interlayers on Microstructures and Optical Properties of Thin Ag Films on Glass Substrates
[2]
XIA Zhi-Lin;DENG De-Gang;FAN Zheng-Xiu;SHAO Jian-Da. Development in Laser Induced Extrinsic Absorption Damage Mechanism of Dielectric Films
[3]
LI Zu-Bin;TIAN Jian-Guo;ZHOU Wen-Yuan;LIU Zhi-Bo;ZANG Wei-Ping;ZHANG Chun-Ping. Highly Directional Emission from a Subwavelength Slit in Metal-Dielectric Layered Films
[4]
ZHANG Zong-Zhi;ZHAO Hui;Cardoso S.;Freitas P. P.. Effect of Anti-Diffusion Oxide Layer on Enhanced Thermal Stability of Magnetic Tunnel Junctions
[5]
ZHANG Xing;ZHANG Qing-Guang;CAO Bing-Yang;FUJII Motoo;TAKAHASHI Koji;IKUTA Tatsuya. Experimental Studies on Thermal and Electrical Properties of Platinum Nanofilms
[6]
LU Yao;SONG Qing-Lin;XIA Shan-Hong. Calculation of Specific Heat for Aluminium Thin Films
[7]
LI Lan;FU Li-Wei;YANG Rui-Xia;LI Guang-Min;TAO Yi;ZHANG Na;ZHANG Xiao-Song. Thermal Behaviour for InGaAsP/InP Multi-Quantum-Well Superluminescent Diodes
[8]
ZONG Fu-Jian;MA Hong-Lei;LIANG Wei;DU Wei;ZHANG Xi-Jian;XIAO Hong-Di;MA Jin;JI Feng;XUE Cheng-Shan;ZHUANG Hui-Zhao. Thermal Decomposition Behaviour of Zn3 N2 Powder
[9]
Raid A. Ismail;Ibrahim Ramadhan;Aseel Mustafa. Growth and Characterization of Cu2 O Films Made by Rapid Thermal Oxidation Technique
[10]
SHEN Zi-Cai;KONG Wei-Jin;SHAO Jian-Da;FAN Zheng-Xiu. Modelling Analysis of Influence of Substrate Surface Defect on Optical Characteristics of Single-Layer Coating
[11]
YE Wei-Min;YUAN Xiao-Dong;JI Jia-Rong;ZENG Chun. Calculation of Guided Modes and Leaky Modes in Photonic Crystal Slabs
[12]
WANG Lin-Jun;XIA Yi-Ben;FANG Zhi-Jun;ZHANG Ming-Long;SHEN Hu-Jiang. Properties of Diamond Film/Alumina Composites for Integrated Circuits with Ultra-High Speed and High Power
[13]
HUANG Zheng-Xing;TANG Zhen-An;XU Zi-Qiang;DING Hai-Tao;GU Yu-Qin. In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique
[14]
AN Bing;ZHANG Tong-Jun;YUAN Chao;CUI Kun. Apparatus for Real-Time Measurement of Stress in Thin Films at
Elevated Temperatures
[15]
DONG Xun;HUANG Jin-Song;LI Da-Bing;LIU Xiang-Lin;XU Zhong-Ying;WANG Zhan-Guo. Time-Resolved Photoluminescence Studies of AlInGaN Alloys
1994, Vol. 11 
