Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition
ZHENG Lirong, CHEN Yiqing, LIN Chenglu, ZOU Shichang
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050
Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition
ZHENG Lirong;CHEN Yiqing;LIN Chenglu;ZOU Shichang
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050
Abstract： Lead zirconate titanate thin films were prepared by pulsed excimer laser deposition on silicon substrates. Rapid thermal annealing was used to improve its properties. Structural and interfacial characteristics of the films before and after annealing were investigated by x-ray diffraction, Rutherford backscattering spectrometry and automatic spreading resistance.
ZHENG Lirong;CHEN Yiqing;LIN Chenglu;ZOU Shichang. Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition
[J]. 中国物理快报, 1994, 11(8): 518-521.
ZHENG Lirong, CHEN Yiqing, LIN Chenglu, ZOU Shichang. Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition
. Chin. Phys. Lett., 1994, 11(8): 518-521.
1994, Vol. 11 
