Effects of Hydrogen Ion Bombardment on Carbon Terminated
Si (111) Surface Studied by LEED and AES
HU Xiaoming, LIN Zhangda
State Key Laboratory of Surface Physics, Institute of Physics, Academia Sinica, Beijing 100080
Effects of Hydrogen Ion Bombardment on Carbon Terminated
Si (111) Surface Studied by LEED and AES
HU Xiaoming;LIN Zhangda
State Key Laboratory of Surface Physics, Institute of Physics, Academia Sinica, Beijing 100080
关键词 ：
61.14.Hg ,
68.35.Rh ,
82.65.My
Abstract ： Etching effects of hydrogen ions on the Si(111)-(1x1)C surface have been studied by LEED (low-energy electron diffraction) and AES (Auger electron spectroscopy). It has been found that hydrogen ions, can break the carbon-silicon covalent bonds and cause a phase transition of Si(111)-(1x1)C to the reconstructed Si(111)-(7x7) structure.
Key words ：
61.14.Hg
68.35.Rh
82.65.My
出版日期: 1994-08-01
引用本文:
HU Xiaoming;LIN Zhangda. Effects of Hydrogen Ion Bombardment on Carbon Terminated
Si (111) Surface Studied by LEED and AES
[J]. 中国物理快报, 1994, 11(8): 498-501.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1994/V11/I8/498
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