Cubic Silicon Carbite Film Growth and Characterization by Hot
Filament Chemical Vapor Deposition
SHI Hongtao, ZHANG Rong, ZHENG Youdou, HE Yuliang, LIU Xiangna
Department of Physics, Nanjing University, Nanjing 210008
Cubic Silicon Carbite Film Growth and Characterization by Hot
Filament Chemical Vapor Deposition
SHI Hongtao;ZHANG Rong;ZHENG Youdou;HE Yuliang;LIU Xiangna
Department of Physics, Nanjing University, Nanjing 210008
关键词 ：
78.20.-e ,
78.30.-j ,
78.55.-m
Abstract ： Cubic silicon carbide films (β-Sic) have been successfully grown on monocrystalline silicon wafers by hot filament chemical vapor deposition (HFCVD) at temperatures ranging from 500 to 650°C, fulfilled by a two step process. Raman spectrum of the HFCVD-grown β-SiC films shows a characteristic peak at 975 cm-1 with a full width at half maximum (FWHM) of 76cm-1 . At room temperature, the films emit visible photoluminescence at 580nm with an FWHM of 0.4eV. X-ray diffraction and x-ray photoelectron spectroscopy investigations reveal that the epitaxial films are of good quality.
Key words ：
78.20.-e
78.30.-j
78.55.-m
出版日期: 1994-11-01
:
78.20.-e
(Optical properties of bulk materials and thin films)
78.30.-j
(Infrared and Raman spectra)
78.55.-m
(Photoluminescence, properties and materials)
引用本文:
SHI Hongtao;ZHANG Rong;ZHENG Youdou;HE Yuliang;LIU Xiangna. Cubic Silicon Carbite Film Growth and Characterization by Hot
Filament Chemical Vapor Deposition
[J]. 中国物理快报, 1994, 11(11): 709-712.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1994/V11/I11/709
[1]
YANG Jian;QIU Tai;SHEN Chun-Ying. New BCN Fibres for Strong Ultraviolet and Visible Light Luminescence
[2]
LI Guang-Min;LI-Lan;WANG Da-Jian;ZHANG Xiao-Song;TAO Yi. Effect of Al3+ on Photoluminescence Properties of Eu3+ -Doped BaZr(BO3 )2 Phosphors
[3]
WANG Da-Jian;WANG Ji-Lei;LI Lan. Colour Tuning of Single Host Phosphors for White Light by Al Addition
[4]
SUN Cheng-Lin;LI Jian-Fu;HU Chang-Hong;JIANG Zhan-Kui;. Optical Properties of Pr3+ -Doped Y2 SiO5 Crystals
[5]
DAI Shi-Xun;ZHANG Xiang-Hua;XU Tie-Feng;SHEN Xiang;WANG Xun-Shi;NIE Qiu-Hua. High Efficiency Infrared-to-Visible Upconversion Emission in Er3+ ,Yb3+ , and Ho3+ Codoped Tellurite Glasses
[6]
FANG Ying-Cui;ZHANG Zhuang-Jian;SHEN Jie;LU Ming. Photoluminescence from Electron-Beam Deposited CeO2 Thin Film after High Temperature Thermal Annealing
[7]
DAI Shi-Xun;XU Tie-Feng;NIE Qiu-Hua;SHEN Xiang;WANG Xun-Si. Concentration Quenching in Erbium Doped Bismuth Silicate Glasses
[8]
HUANG Sheng-Li;RUAN Ke-Qing;TANG Yu;CAO Lie-Zhao;LI Xiao-Guang. Electrical Properties and Raman Spectra of BaBi1-x Pbx O3
[9]
LIANG Xin-Gang;HAN Mao-Hua. Experimental Study on Coherence of Thermal Radiation of Thin Film Structures
[10]
QIAN Bo;CHEN San;CEN Zhan-Hong;CHEN Kun-Ji;LIU Yan-Song;XU Jun;MA Zhong-Yuan;LI Wei;HUANG Xin-Fan. Step-by-Step Laser Crystallization of Amorphous Si:H/SiNx :H Multilayer for Active Layer in Microcavities
[11]
Akhlesh Lakhtakia;Tom G. Mackay. Dyadic Green Function for an Electromagnetic Medium Inspired by General Relativity
[12]
ZHANG Qin-Yuan; YANG Gang-Feng;JIANG Zhong-Hong;W. X. Que. Structural and Luminescence Properties of Transparent Nanocrystalline ZrO2 :Er3+ Films
[13]
GAO Guo-Xiang;XU Jing-Jun;ZHANG Shu;LIU Wen-Hui;LIU Hong-De;KONG Yong-Fa;CHEN Shao-Lin;ZHANG Guang-Yin;SUN Qian. Photo-Induced Carriers in Near-Stoichiometric LiNbO3 :Fe Crystal
[14]
LU Zun-Ming;SUN Ji-Rong;LI Yang-Xian. Infrared Absorption of Phase Separated La0.67-x Prx Ca0.33 MnO3
[15]
SHI Dong-Mei;ZHANG Qin-Yuan;YANG Gang-Feng;LIU Yue-Hui;JIANG Zhong-Hong. Tm3+ -doped Ga2 O3 -GeO2 -Bi2 O3 -PbO(PbF2 ) Glasses for 1.47-μm Optical Amplifications
1994, Vol. 11 
