Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation
JIAO Yang1, WANG Ke-Ming1, WANG Xue-Lin1, CHEN Feng1,
WANG Lei1, WANG Liang-Ling1, LU Qing-Ming2, MA Hong-Ji3, NIE Rie3
¹School of Physics and Microelectronics, Shandong University, Jinan 250100
²School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
³The Key Laboratory of Heavy Ion Physics of Ministry of Education, Peking University, Beijing 100871
Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation
¹School of Physics and Microelectronics, Shandong University, Jinan 250100
²School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
³The Key Laboratory of Heavy Ion Physics of Ministry of Education, Peking University, Beijing 100871
Abstract： A planar optical waveguide was formed in RbTiOPO4; crystal by 6.0-MeV oxygen ion implantation with the dose of 2×1015 ions/cm² at room temperature. Annealing at 200°C for 30 min in air is performed to improve the thermal stability of the waveguide. The dark modes of the waveguide are measured at wavelengths 633 and 1539 nm, respectively. The refractive index profiles in the guiding layer are reconstructed by using the reflectivity calculation method. TRIM'98 code was carried out to simulate the damage profiles caused by the implantation process to obtain a better understanding of the waveguide formation.
JIAO Yang;WANG Ke-Ming;WANG Xue-Lin;CHEN Feng;
WANG Lei;WANG Liang-Ling;LU Qing-Ming;MA Hong-Ji;NIE Rie. Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation[J]. 中国物理快报, 2006, 23(12): 3328-3330.
JIAO Yang, WANG Ke-Ming, WANG Xue-Lin, CHEN Feng,
WANG Lei, WANG Liang-Ling, LU Qing-Ming, MA Hong-Ji, NIE Rie. Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation. Chin. Phys. Lett., 2006, 23(12): 3328-3330.
2006, Vol. 23 
