Combined Use of Differential Scanning Calorimetry and Cross-Sectional Transmission Electron Microscopy for Characterization of Thin-Film Reactions
MA En
Massachusetts Institute of Technology, Cambridge MA 02139, and IBM T. J. Watson Reseach Center, Yorktown Heights, NY 10598, USA
Combined Use of Differential Scanning Calorimetry and Cross-Sectional Transmission Electron Microscopy for Characterization of Thin-Film Reactions
MA En
Massachusetts Institute of Technology, Cambridge MA 02139, and IBM T. J. Watson Reseach Center, Yorktown Heights, NY 10598, USA
关键词 ：
68.35.Rh ,
61.16.Di ,
82.40.-g
Abstract ： We demonstrate that the combined use of differential scanning calorimetry (DSC) and cross-sectional transmission electron microscopy (XTEM) is a powerful technique in the quantitative investigation of the nucleation and growth of metastable and equilibrium phases during thin-film interdiffusion reactions. The Various approaches and advantages of the DSC/XTEM technique in obtaining a variety of kinetic and thermodynamic data are discussed. Explosive reactions, as opposed to conventionally controlled reactions, may occur in thin films where the multilayer geometry is used.
Key words ：
68.35.Rh
61.16.Di
82.40.-g
出版日期: 1991-08-01
:
68.35.Rh
(Phase transitions and critical phenomena)
61.16.Di
82.40.-g
(Chemical kinetics and reactions: special regimes and techniques)
引用本文:
MA En. Combined Use of Differential Scanning Calorimetry and Cross-Sectional Transmission Electron Microscopy for Characterization of Thin-Film Reactions[J]. 中国物理快报, 1991, 8(8): 400-403.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1991/V8/I8/400
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