Abstract： This letter presents the results of the influnces of an ultra-violet lithography (UVL) and a h e r beam canning lithography (LBSL) on the superconductivity of YBaCuO thin films on SrTiO3 substrates. The degeneration of superconductivity of YBaCuO thin films in UVL process is more than that in LBSL process.
SUN Yuping;LIU Genqing;XU Xingcai;ZHU Xi;LUO Tangsheng. INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS
[J]. 中国物理快报, 1990, 7(1): 32-35.
SUN Yuping, LIU Genqing, XU Xingcai, ZHU Xi, LUO Tangsheng. INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS
. Chin. Phys. Lett., 1990, 7(1): 32-35.
1990, Vol. 7 
