Silicon-on-Insulator Based 2 x 2 Multimode Interference Coupler with Large Tolerance
WEI Hong-Zhen1, YU Jin-Zhong1, LIU Zhong-Li2, ZHANG Xiao-Feng1, SHI Wei3, FANG Chang-Shui3
1State Key Laboratory on Integrated Optoelectronics, and
2Microelectronics Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
3State Key Laboratory of Crystal Materials, Shandong University, Ji’nan 250100
Silicon-on-Insulator Based 2 x 2 Multimode Interference Coupler with Large Tolerance
1State Key Laboratory on Integrated Optoelectronics, and
2Microelectronics Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
3State Key Laboratory of Crystal Materials, Shandong University, Ji’nan 250100
Abstract： We demonstrate a type of 2 x 2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-field output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2μm, respectively. The devices show a uniform power distribution.
2001, Vol. 18 
