Optical Waveguide Formation in LiNbO3 by the 2.6 MeV
Nickel Ions Implantation
HU Hui1, CHEN Feng1, LU Fei1, ZHANG Jian-Hua1, LIU Ji-Tian1, WANG Ke-Ming1, SHI Bo-Rong1,2, SHEN Ding-Yu3, WANG Xue-Mei3
1Department of Physics, Shandong University, Ji’nan 250100
2Department of Physics, University of Osnabrueck, D-49069, Osnabrueck, Germany
3MOE Key Laboratory of Heavy Ion Physics, Peking University, Beijing 100871
Optical Waveguide Formation in LiNbO3 by the 2.6 MeV
Nickel Ions Implantation
HU Hui1;CHEN Feng1;LU Fei1;ZHANG Jian-Hua1;LIU Ji-Tian1;WANG Ke-Ming1;SHI Bo-Rong1,2;SHEN Ding-Yu3;WANG Xue-Mei3
1Department of Physics, Shandong University, Ji’nan 250100
2Department of Physics, University of Osnabrueck, D-49069, Osnabrueck, Germany
3MOE Key Laboratory of Heavy Ion Physics, Peking University, Beijing 100871
Abstract： The optical waveguide was formed on an LiNbO3 substrate by 2.6 MeV nickel ions implantation to the dose of 9 x 1014 ions/cm2. Five dark modes were observed by the prism coupling technique. The refractive index profile was obtained by using the reflectivity calculation method. A large index decrease was found in the guiding region and in the optical barrier, which is somewhat different from that of the LiNbO3 waveguide formed by the MeV He+ ions. The position of the optical barrier is deeper than that of the damage peak calculated by TRIM'90 (Transport of Ions in Matter) code. The crystal lattice damage in the guiding region caused by the Ni+ ion implantation was analysed by the Rutherford backscattering/channelling technique.
HU Hui;CHEN Feng;LU Fei;ZHANG Jian-Hua;LIU Ji-Tian;WANG Ke-Ming;SHI Bo-Rong;SHEN Ding-Yu;WANG Xue-Mei. Optical Waveguide Formation in LiNbO3 by the 2.6 MeV
Nickel Ions Implantation[J]. 中国物理快报, 2001, 18(2): 242-244.
HU Hui, CHEN Feng, LU Fei, ZHANG Jian-Hua, LIU Ji-Tian, WANG Ke-Ming, SHI Bo-Rong, SHEN Ding-Yu, WANG Xue-Mei. Optical Waveguide Formation in LiNbO3 by the 2.6 MeV
Nickel Ions Implantation. Chin. Phys. Lett., 2001, 18(2): 242-244.
2001, Vol. 18 
