1Structure Research Laboratory and Department of Physics, University of Science and Technology of China, Hefei 230026
2Department of Electronics, Peking University, Beijing 100871
Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface
1Structure Research Laboratory and Department of Physics, University of Science and Technology of China, Hefei 230026
2Department of Electronics, Peking University, Beijing 100871
Abstract： Based on corrected rate equations, the kinetics is revealed for initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface. In this case, the mobility and coalescence terms in rate equations are neglected, and the coverage term takes a dominant role. All the calculated results are in agreement with experimental data. These results introduce a new scaling in the case of dominant coverage, which is different from the those in the case of coalescence or mobility in a dominant role.
SHAO Qing-Yi;FANG Rong-Chuan;ZHU Kai-Gui;LIAO Yuan;XUE Zeng-Quan. Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface[J]. 中国物理快报, 2001, 18(8): 1135-1137.
SHAO Qing-Yi, FANG Rong-Chuan, ZHU Kai-Gui, LIAO Yuan, XUE Zeng-Quan. Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface. Chin. Phys. Lett., 2001, 18(8): 1135-1137.
2001, Vol. 18 
