Silica-Based Arrayed Waveguide Grating with Flattened Spectral Response Using a Multimode Interference Coupler
TANG Yan-Zhe1, JIA Ke-Miao1, LI Bai-Yang1, YANG Jian-Yi1, JIANG Xiao-Qing1, WU Ya-Ming2, WANG Yue-Lin1,2
1Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027
2State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
Silica-Based Arrayed Waveguide Grating with Flattened Spectral Response Using a Multimode Interference Coupler
1Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027
2State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
Abstract： We designed and fabricated an arrayed waveguide grating based on silica-on-silicon materials with flattened spectral response by adding a multimode interference coupler in the input region. The theoretical analysis and calculation are given. The device has worked effectively and has been tested with the passband 0.43 nm at 1 dB, 0.72 nm at 3 dB and 1.56 nm at 20 dB respectively, at a cost of power penalty of about 1.5 dB. The crosstalk is less than -30 dB, owing to the high-resolution photomask and well-controlled fabrication processes.
2004, Vol. 21 
