Electron Field Emission from Different sp3 Content Diamond-Like Carbon Films
MAO Dong-sheng1, ZHAO Jun1, LI Wei1, WANG Xi1, LIU Xiang-huai1, ZHU Yu-kun2, ZHOU Jiang-yun2, FAN Zhong2, LI Qiong2, XU Jing-fang2
1Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050
2Department of Electronics Science and Technology, East China Normal University, Shanghai 200062
Electron Field Emission from Different sp3 Content Diamond-Like Carbon Films
1Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050
2Department of Electronics Science and Technology, East China Normal University, Shanghai 200062
Abstract： Different sp3 content diamond-like carbon films are deposited on to highly n-doped Si (111) substrates by a new plasma deposition technique-filtered arc deposition. Their electron field emission properties are studied by using a simple diode structure. It is showed that the turn-on field is decreased and field emission current density is increased with the increasing sp3 content (75-80%, 80-83%,and 88-90%) of the films. Field emission current of 0.1μA from the three samples was detected under the electric field of 10.1, 5.6, and 2.9 V/μm and emission current density of 4.4, 15.2, and 43.2μA/cm2, respectively, under 14.3 V/μm. Fowler-Nordheim (F-N) plots of the three samples nearly show of lineaity indicating that electron field emission obeys F-N theory.
MAO Dong-sheng;ZHAO Jun;LI Wei;WANG Xi;LIU Xiang-huai;ZHU Yu-kun;ZHOU Jiang-yun;FAN Zhong;LI Qiong;XU Jing-fang. Electron Field Emission from Different sp3 Content Diamond-Like Carbon Films[J]. 中国物理快报, 1999, 16(2): 152-154.
MAO Dong-sheng, ZHAO Jun, LI Wei, WANG Xi, LIU Xiang-huai, ZHU Yu-kun, ZHOU Jiang-yun, FAN Zhong, LI Qiong, XU Jing-fang. Electron Field Emission from Different sp3 Content Diamond-Like Carbon Films. Chin. Phys. Lett., 1999, 16(2): 152-154.
1999, Vol. 16 
