Fabrication of Compound Lattice by Holographic Lithography
ZHONG Yong-Chun, ZHU Shao-An, WANG He-Zhou
State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-Sen University,Guangzhou 510275
Fabrication of Compound Lattice by Holographic Lithography
ZHONG Yong-Chun;ZHU Shao-An;WANG He-Zhou
State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-Sen University,Guangzhou 510275
关键词 ：
42.70.Qs ,
42.40.My ,
42.40.Jv
Abstract ： Some compound lattices in photonic crystals with large complete photonic band gaps, such as the diamond structure and the two-dimensional hexagonal compound structure, is desired for fabrication. A novel method for fabrication of compound lattices by holographic lithography is reported. The key point is phase modulation by photoelectrical control and multiple-exposure techniques. This technique introduces many advances: for instance, using the same coherent beams and without changing the position of the sample during multiple-exposure.
Key words ：
42.70.Qs
42.40.My
42.40.Jv
出版日期: 2005-02-01
引用本文:
ZHONG Yong-Chun;ZHU Shao-An;WANG He-Zhou. Fabrication of Compound Lattice by Holographic Lithography[J]. 中国物理快报, 2005, 22(2): 369-372.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I2/369
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2005, Vol. 22 
