Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology
ZHEN Wan-Bao1.2, LIU Wei-Li1, SONG Zhi-Tang1, FENG Song-Lin1, ZHU Shi-Fu2, ZHAO Bei-Jun2
1The Research Centre of Semiconductor Functional Film Engineering Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
2Department of Materials Science and Engineering, Sichuan University, Chendu 610064
Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology
1The Research Centre of Semiconductor Functional Film Engineering Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
2Department of Materials Science and Engineering, Sichuan University, Chendu 610064
Abstract： A single crystal Si thin film on a glass substrate has been obtained successfully by hydrophilic fusion bonding and the smart-cut technology. Tensile strength testing shows that the bonded interface has strong adhesion and the bonding strength is about 8.7MPa. Crystallinity and microstructure of the samples have been characterized by transmission electron microscopy (TEM). Electrical properties have also been investigated by Hall measurements and four-point probe. The mobility of the transferred Si layer on glass is about 122cm2/V.s. The results show that the single-crystal silicon layer transferred onto glass by direct bonding keeps good quality for the applications of integrated circuits, transducers, and flat panel display.
ZHEN Wan-Bao.;LIU Wei-Li;SONG Zhi-Tang;FENG Song-Lin;ZHU Shi-Fu;ZHAO Bei-Jun. Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology[J]. 中国物理快报, 2004, 21(12): 2540-2542.
ZHEN Wan-Bao., LIU Wei-Li, SONG Zhi-Tang, FENG Song-Lin, ZHU Shi-Fu, ZHAO Bei-Jun. Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology. Chin. Phys. Lett., 2004, 21(12): 2540-2542.
2004, Vol. 21 
