Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses
AN Ran, LI Yan, DOU Yan-Ping, FANG Ying, YANG Hong, GONG Qi-Huang
State Key Laboratory for Mesoscopic Physics and Department of Physics, Peking University, Beijing 100871
Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses
AN Ran;LI Yan;DOU Yan-Ping;FANG Ying;YANG Hong;GONG Qi-Huang
State Key Laboratory for Mesoscopic Physics and Department of Physics, Peking University, Beijing 100871
关键词 ：
52.38.Mf ,
61.80.Ba ,
42.65.Re
Abstract ： Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated.
Key words ：
52.38.Mf
61.80.Ba
42.65.Re
出版日期: 2004-12-01
:
52.38.Mf
(Laser ablation)
61.80.Ba
(Ultraviolet, visible, and infrared radiation effects (including laser radiation))
42.65.Re
(Ultrafast processes; optical pulse generation and pulse compression)
引用本文:
AN Ran;LI Yan;DOU Yan-Ping;FANG Ying;YANG Hong;GONG Qi-Huang. Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses[J]. 中国物理快报, 2004, 21(12): 2465-2469.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2004/V21/I12/2465
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2004, Vol. 21 
