Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films repared by Electron Beam Evaporation
TAN Tian-Ya1,2, ZHANG Da-Wei1,2, ZHAN Mei-Qiong1,2, SHAO Jian-Da1, FAN Zheng-Xiu1
1R & D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Graduate School of the Chinese Academy of Sciences, Beijing 100039
Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films repared by Electron Beam Evaporation
TAN Tian-Ya1,2;ZHANG Da-Wei1,2;ZHAN Mei-Qiong1,2;SHAO Jian-Da1;FAN Zheng-Xiu1
1R & D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Graduate School of the Chinese Academy of Sciences, Beijing 100039
Abstract： ZrO2 thin films were deposited by using an electron beam evaporation technique on three kinds of lithium triborate (LiB3O5 or LBO) substrates with the surfaces at specified crystalline rientations. The influences of the LBO structure on the structural and optical properties of ZrO2 thin films are studied by spectrophotometer and x-ray diffraction. The results indicate that the substrate structure has obvious effects on the structural and optical properties of the film: namely, the ZrO2 thin film deposited on the X-LBO, Y-LBO and Z-LBO orients to m(-212), m(021) and o(130) directions. It is also found that the ZrO2 thin film with m(021) has the highest refractive index and the least lattice misfit.
TAN Tian-Ya;ZHANG Da-Wei;ZHAN Mei-Qiong;SHAO Jian-Da;FAN Zheng-Xiu. Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films repared by Electron Beam Evaporation[J]. 中国物理快报, 2005, 22(1): 227-229.
TAN Tian-Ya, ZHANG Da-Wei, ZHAN Mei-Qiong, SHAO Jian-Da, FAN Zheng-Xiu. Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films repared by Electron Beam Evaporation. Chin. Phys. Lett., 2005, 22(1): 227-229.
2005, Vol. 22 
