中国物理快报  2005, Vol. 22 Issue (2): 405-408    
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Dust Charging in Electronegative SiH4 Plasmas
DUAN Ping1,2, WANG Zheng-Xiong2, LIU Yue2, LIU Jin-Yuan2, WANG Xiao-Gang2
1Department of Physics, Dalian University, Dalian 116622 2State Key Laboratory of Materials Modification by Laser, Electron and Ion Beams, Dalian University of Technology, Dalian 116024
Dust Charging in Electronegative SiH4 Plasmas
DUAN Ping1,2;WANG Zheng-Xiong2;LIU Yue2;LIU Jin-Yuan2;WANG Xiao-Gang2
1Department of Physics, Dalian University, Dalian 116622 2State Key Laboratory of Materials Modification by Laser, Electron and Ion Beams, Dalian University of Technology, Dalian 116024