Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges
MA Jie, PU Yi-Kang
Department of Engineering Physics, Tsinghua University, Beijing
100084
Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges
MA Jie;PU Yi-Kang
Department of Engineering Physics, Tsinghua University, Beijing
100084
关键词 ：
52.20.Fs ,
52.25.Jm ,
52.70.Ds ,
52.70.Kz
Abstract ： By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2 /Ar mixtures at 200 W rf powers. In pure N2 discharges a Maxwellian EEDF is observed. When the mixing ratio of Ar increases, the distribution of high energy electrons evolves with a different trend from that of low energy electrons, resulting in an apparent “two temperature structure”of the EEDF. We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of “electron temperature” by both the probe and line ratio technique.
Key words ：
52.20.Fs
52.25.Jm
52.70.Ds
52.70.Kz
出版日期: 2003-09-01
:
52.20.Fs
(Electron collisions)
52.25.Jm
(Ionization of plasmas)
52.70.Ds
(Electric and magnetic measurements)
52.70.Kz
(Optical (ultraviolet, visible, infrared) measurements)
引用本文:
MA Jie;PU Yi-Kang. Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges[J]. 中国物理快报, 2003, 20(9): 1527-1529.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2003/V20/I9/1527
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2003, Vol. 20 
