Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering
LIU Cui, LI Guo-Qing, GOU Wei, MU Zong-Xin, ZHANG Cheng-Wu
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024
Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering
LIU Cui;LI Guo-Qing;GOU Wei;MU Zong-Xin;ZHANG Cheng-Wu
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024
关键词 ：
68.55.Jk ,
81.05.Uw ,
81.15.Cd ,
82.80.Ch
Abstract ： Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron sputtering and the DLC characteristics of the films are confirmed by Raman spectra. It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5μm/h is obtained by using the sputtering current of 30 A. The friction coefficient of the films is 0.2--0.225 measured by using a pin-on-disc microtribometer. The structure of the films tends to have a growth of sp3 bonds content at high sputtering current. The compressive residual stress in the films increases with the increasing sputtering current of the target.
Key words ：
68.55.Jk
81.05.Uw
81.15.Cd
82.80.Ch
出版日期: 2004-11-01
引用本文:
LIU Cui;LI Guo-Qing;GOU Wei;MU Zong-Xin;ZHANG Cheng-Wu. Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering[J]. 中国物理快报, 2004, 21(11): 2249-2251.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2004/V21/I11/2249
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2004, Vol. 21 
