中国物理快报  2003, Vol. 20 Issue (6): 942-943    
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Structural and Optical Characterization of Zn1-xCdxO Thin Films Deposited by dc Reactive Magnetron Sputtering
MA De-Wei1, YE Zhi-Zhen1, HUANG Jing-Yun1, ZHAO Bing-Hui1, WAN Shou-Ke2, SUN Xue-Hao2, WANG Zhan-Guo2
1State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027 2Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083
Structural and Optical Characterization of Zn1-xCdxO Thin Films Deposited by dc Reactive Magnetron Sputtering
MA De-Wei1;YE Zhi-Zhen1;HUANG Jing-Yun1;ZHAO Bing-Hui1;WAN Shou-Ke2;SUN Xue-Hao2;WANG Zhan-Guo2
1State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027 2Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083