Nano-crystalline CNx Films and Field Electron Emission Properties
HANG Lan1,3, MA Hui-Zhong1, LI Hui-Jun2, YANG Shi-E2, YAO Ning2, HU Huan-Ling3, ZHANG Bing-Lin2
1Department of Engineering Mechanics, Zhengzhou University, Zhengzhou 450002
2Department of Physics, Zhengzhou University, Zhengzhou 450052
3Anhui Optics and Fine Mechanics Institute, Chinese Academy of Sciences, Hefei 230031
Nano-crystalline CNx Films and Field Electron Emission Properties
HANG Lan1,3;MA Hui-Zhong1;LI Hui-Jun2;YANG Shi-E2;YAO Ning2;HU Huan-Ling3;ZHANG Bing-Lin2
1Department of Engineering Mechanics, Zhengzhou University, Zhengzhou 450002
2Department of Physics, Zhengzhou University, Zhengzhou 450052
3Anhui Optics and Fine Mechanics Institute, Chinese Academy of Sciences, Hefei 230031
Abstract: CNx films with x ≈ 0.5 were prepared onto a titanium coated ceramic substrate by using microwave plasma enhanced chemical vapor deposition. As-deposited films were studied by x-ray photoelectron spectroscopy (XPS), x-ray diffraction, and scanning electron microscopy. The films consist of nano-crystalline grains with sites in a range of 20-40nm approximately. The interplanar distance (d-value) of the nano-crystalline structure determined from the peak position of x-ray diffraction was found to be 0.336 nm. This value is consistent with the d-value of graphite. XPS measurements of the N 1 s and C 1 s core levels for the same sample demonstrate two types of bonding structures between carbon and nitrogen atoms, corresponding to sp2 C-N and sp3 C-N. It is suggested that the N atoms mainly exist in aromatic rings of the nano-graphite layers by substituting carbon positions with nitrogen. Field electron emission characteristics of the film were tested. The turn-on field of the emission was as low as 1.1V/μm.
HANG Lan;MA Hui-Zhong;LI Hui-Jun;YANG Shi-E;YAO Ning;HU Huan-Ling;ZHANG Bing-Lin. Nano-crystalline CNx Films and Field Electron Emission Properties[J]. 中国物理快报, 2003, 20(4): 579-581.
HANG Lan, MA Hui-Zhong, LI Hui-Jun, YANG Shi-E, YAO Ning, HU Huan-Ling, ZHANG Bing-Lin. Nano-crystalline CNx Films and Field Electron Emission Properties. Chin. Phys. Lett., 2003, 20(4): 579-581.