Nano-crystalline CNx Films and Field Electron Emission Properties
HANG Lan1,3, MA Hui-Zhong1, LI Hui-Jun2, YANG Shi-E2, YAO Ning2, HU Huan-Ling3, ZHANG Bing-Lin2
1Department of Engineering Mechanics, Zhengzhou University, Zhengzhou 450002
2Department of Physics, Zhengzhou University, Zhengzhou 450052
3Anhui Optics and Fine Mechanics Institute, Chinese Academy of Sciences, Hefei 230031
Nano-crystalline CNx Films and Field Electron Emission Properties
HANG Lan1,3;MA Hui-Zhong1;LI Hui-Jun2;YANG Shi-E2;YAO Ning2;HU Huan-Ling3;ZHANG Bing-Lin2
1Department of Engineering Mechanics, Zhengzhou University, Zhengzhou 450002
2Department of Physics, Zhengzhou University, Zhengzhou 450052
3Anhui Optics and Fine Mechanics Institute, Chinese Academy of Sciences, Hefei 230031
Abstract： CNx films with x ≈ 0.5 were prepared onto a titanium coated ceramic substrate by using microwave plasma enhanced chemical vapor deposition. As-deposited films were studied by x-ray photoelectron spectroscopy (XPS), x-ray diffraction, and scanning electron microscopy. The films consist of nano-crystalline grains with sites in a range of 20-40nm approximately. The interplanar distance (d-value) of the nano-crystalline structure determined from the peak position of x-ray diffraction was found to be 0.336 nm. This value is consistent with the d-value of graphite. XPS measurements of the N 1 s and C 1 s core levels for the same sample demonstrate two types of bonding structures between carbon and nitrogen atoms, corresponding to sp2 C-N and sp3 C-N. It is suggested that the N atoms mainly exist in aromatic rings of the nano-graphite layers by substituting carbon positions with nitrogen. Field electron emission characteristics of the film were tested. The turn-on field of the emission was as low as 1.1V/μm.
HANG Lan;MA Hui-Zhong;LI Hui-Jun;YANG Shi-E;YAO Ning;HU Huan-Ling;ZHANG Bing-Lin. Nano-crystalline CNx Films and Field Electron Emission Properties[J]. 中国物理快报, 2003, 20(4): 579-581.
HANG Lan, MA Hui-Zhong, LI Hui-Jun, YANG Shi-E, YAO Ning, HU Huan-Ling, ZHANG Bing-Lin. Nano-crystalline CNx Films and Field Electron Emission Properties. Chin. Phys. Lett., 2003, 20(4): 579-581.
2003, Vol. 20 
