摘要Taking into account the compensation effect of B to Ge in strained SiGe layers for the first time, the effect of heavily doped boron on the bandgap narrowing of strained SiGe layers is calculated, and the classical Jain--Roulston (J-R) model is modified. The results show that our modified J-R model well fits the experimental values. Based on the modified J-R model, the real bandgap narrowing distribution between the conduction and valence bands is further calculated, which has great influence on modelling the electrical characteristics of SiGe heterojunction bipolar transistors.
Abstract:Taking into account the compensation effect of B to Ge in strained SiGe layers for the first time, the effect of heavily doped boron on the bandgap narrowing of strained SiGe layers is calculated, and the classical Jain--Roulston (J-R) model is modified. The results show that our modified J-R model well fits the experimental values. Based on the modified J-R model, the real bandgap narrowing distribution between the conduction and valence bands is further calculated, which has great influence on modelling the electrical characteristics of SiGe heterojunction bipolar transistors.
[1] Kroemer H 1982 Proc. IEEE 70 13 [2] Yao F, Cheng B W, Xue C L and Wang Q M 2005 Chin. J.Semicond. 26 117 (in Chinese) [3] Pei Z, Liang C S, Lai L S, Tseng Y T, Chen P S, Lu S C, Liu C M,Tsai M J and Liu C W 2002 Proc. IEDM San Francisco December 8-11 48 297 [4] Schuppen A and Dietrich H 1995 J. Cryst. Growth 157 207 [5] Berranger E D, Bodnar S, Chantre A, Kirtsch J, Monroy A, Granier A,Laurens M, Regolini J L and Mouis M 1997 Thin Solid Films 294 250 [6] Meyer D J, Webb D A, Ward M G, Sellar J D, Zeng P Y and Robinson J 2001 Mater. Sci. Semiconduct. Proc. 4 529 [7] Zhou S L, Cui H L, Huang Y Q and Ren X M 2006 Chin. J.Semicond. 27 110 (in Chinese) [8] Jain S C and Roulston D J 1991 Solid-State Electron. 34 453 [9] Matutinovic-Krstelj Z, Venkataraman V, Prinz E J, Strum J C andMagee C W 1996 IEEE Trans. Electron. Devices 43 457 [10] Lopez-Gonzalez J M and Prat L 1997 IEEE Trans. Electron.Devices 44 1046 [11] Maszara W P and Thompson T 1992 J. Appl. Phys. 72 4477 [12] Herzog H J, Csepregi L and Seidel H 1984 J. Electrochem.Soc. Am. 131 2969 [13] Cheng B W, Yao F, Xue C L, Zhang J G, Li C B, Mao R W, Zuo Y H,Luo L P and Wang Q M 2005 Chin. J. Semicond. 26 39 (inChinese) [14] Cheng B W, Yao F, Xue C L, Zhang J G, Li C B, Mao R W, Zuo Y H,Luo L P and Wang Q M 2005 Acta Phys. Sin. 54 4350 (in Chinese) [15] Libezny M, Jain S C, Poortmans J, Caymax M, Nijs J, Mertens R,Werner K and Balk R 1994 Appl. Phys. Lett. 64 1953