Vacancy Aggregation in Diamond Films grown in CH4+H2 Atmosphere by MPCVD
LIU Yan-Yan1, ZHANG Qing-Yu1, Elizabeth BAUER-GROSSE2
1State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 1160242Laboratoire de Science et Génie des Surfaces, UMR 7570, Ecole des Mines, Parc de Saurupt, Nancy Cedex 54042, France
Vacancy Aggregation in Diamond Films grown in CH4+H2 Atmosphere by MPCVD
LIU Yan-Yan1;ZHANG Qing-Yu1;Elizabeth BAUER-GROSSE2
1State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 1160242Laboratoire de Science et Génie des Surfaces, UMR 7570, Ecole des Mines, Parc de Saurupt, Nancy Cedex 54042, France
摘要Transmission electron microscopy is applied to study the diamond film grown in a CH4 and H2 gaseous mixture by microwave plasma assisted chemical vapour deposition. Defects in the nanometre scale, dislocation loops, are first observed in diamond films. The dislocation loops are found to be of co-existence with planar defects and are next to the planar defects for {111} faceting grains. A possible mechanism is suggested to interpret the co-existence of dislocation loops with planar defects.
Abstract：Transmission electron microscopy is applied to study the diamond film grown in a CH4 and H2 gaseous mixture by microwave plasma assisted chemical vapour deposition. Defects in the nanometre scale, dislocation loops, are first observed in diamond films. The dislocation loops are found to be of co-existence with planar defects and are next to the planar defects for {111} faceting grains. A possible mechanism is suggested to interpret the co-existence of dislocation loops with planar defects.
LIU Yan-Yan;ZHANG Qing-Yu;Elizabeth BAUER-GROSSE. Vacancy Aggregation in Diamond Films grown in CH4+H2 Atmosphere by MPCVD[J]. 中国物理快报, 2007, 24(12): 3502-3505.
LIU Yan-Yan, ZHANG Qing-Yu, Elizabeth BAUER-GROSSE. Vacancy Aggregation in Diamond Films grown in CH4+H2 Atmosphere by MPCVD. Chin. Phys. Lett., 2007, 24(12): 3502-3505.
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2007, Vol. 24 
