摘要Polycrystalline zinc nitride films are deposited on Corning 7059 glass substrates by pulsed filtered cathodic vacuum arc deposition (PFCVAD). The crystallographic structure is studied by means of x-ray diffraction. These measurements show that all the films are crystallized in the cubic structure, in a preferred orientation along the (332) and (631) directions. Weak XRD signal shows small crystallites distributed in an amorphous tissue. A small improvement of crystallinity is observed with annealing. Optical parameters such as absorption, energy band gap, Urbach tail, extinction coefficients have been determined. The Urbach tail energy is decreased with annealing at 500°C for one hour. Energy band gap values are found to be increased by annealing.
Abstract：Polycrystalline zinc nitride films are deposited on Corning 7059 glass substrates by pulsed filtered cathodic vacuum arc deposition (PFCVAD). The crystallographic structure is studied by means of x-ray diffraction. These measurements show that all the films are crystallized in the cubic structure, in a preferred orientation along the (332) and (631) directions. Weak XRD signal shows small crystallites distributed in an amorphous tissue. A small improvement of crystallinity is observed with annealing. Optical parameters such as absorption, energy band gap, Urbach tail, extinction coefficients have been determined. The Urbach tail energy is decreased with annealing at 500°C for one hour. Energy band gap values are found to be increased by annealing.
[1] Juza R, Hahn H and Anorg Z 1940 Allg. Chem. 224 125 [2] Kuriyama K, Takahashi Y and Sunohara F 1993 Phys. Rev. B 48 2781 [3] Yang W, Vispute R D, Choopun S, Sharma R P, Venkatesan T and Shen H2001 Appl. Phys. Lett. 78 2787 [4] Ma J, Ji F, Ma H L and Li S Y 2000 Solar Energy Mater. SolarCells 60 341 [5] Ma H L, Hao X T, Ma J, Yang Y G, Huang S L, Chen F, Wang Q P andZhang D H 2002 Surf. Coat. Technol. 161 58 [6] Partin D E, Williams D J and O'Keeffe M 1997 J. Solid StateChem. 132 56 [7] Futsuhara M, Yoshioka K and Takai O 1998 Thin Solid Films 317 322 [8] Futsuhara M, Yoshioka K and Takai O 1998 Thin Solid Films 322 274 [9] Zong F, Ma H, Du W, Maa J, Zhang X, Xiao H, Ji F and Xue C 2006 Appl. Surf. Sci. 252 7983 [10] Zong F, Ma H, Xue C, Du W, Zhang X, Xiao H, Ma J and Ji F 2006 Mater. Lett. 60 905 [11] Toyoura K, Tsujimura H, Goto T, Hachiya K, Hagiwara R and Ito Y2005 Thin Solid Films 492 88 [12] \c Senad\i m E, Kavak H and Esen R 2006 J. Phys.:Condens. Matter 18 6391 [13] Tauc J, Grigorvici R and Vancu A 1966 Phys. Status Solidi 15 627 [14] Pankove J I 1965 Phys. Rev. 140 A2059
2007, Vol. 24 
