High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner
MU Can-Jun1,2, ZHANG Fei-Ling3, WU Ya-Ming1
1Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 2000502Graduate School of the Chinese Academy of Sciences, Beijing 1000493Spansion (China) Co., Ltd. Suzhou 215021
High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner
MU Can-Jun1,2;ZHANG Fei-Ling3;WU Ya-Ming1
1Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 2000502Graduate School of the Chinese Academy of Sciences, Beijing 1000493Spansion (China) Co., Ltd. Suzhou 215021
摘要A high speed electromagnetically actuated resonant micro-electromechanical systems (MEMS) optical scanner with large mirror area of 6×4mm2 has been developed. The MEMS optical scanner chip is fabricated using bulk silicon micromachining process and electroplating technique, and can generate the maximum optical deflection angle of ±6.8°circ at the 2.95kHz resonant frequency with a quality factor of 197 in air under the low power consumption of 50mW, when it is immersed in a constant 510.2mT magnetic field parallel to the coil plane. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity of mirror at wavelength of 1550nm is high up to 85%. The results show that the device can satisfy the demands of mm-sized scanning systems in optical communications.
Abstract：A high speed electromagnetically actuated resonant micro-electromechanical systems (MEMS) optical scanner with large mirror area of 6×4mm2 has been developed. The MEMS optical scanner chip is fabricated using bulk silicon micromachining process and electroplating technique, and can generate the maximum optical deflection angle of ±6.8°circ at the 2.95kHz resonant frequency with a quality factor of 197 in air under the low power consumption of 50mW, when it is immersed in a constant 510.2mT magnetic field parallel to the coil plane. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity of mirror at wavelength of 1550nm is high up to 85%. The results show that the device can satisfy the demands of mm-sized scanning systems in optical communications.
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2007, Vol. 24 
