Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis
LIU Chao-Zhuo1,3, ZHOU Zhu-Ying1, SHI Li-Qun1, WANG Bao-Yi2, HAO Xiao-Peng2, ZHAO Guo-Qing1
1Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 2004332Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 1000493College of Physics Science and Technology, China University of Petroleum (East China), Dongying 257061
Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis
LIU Chao-Zhuo1,3;ZHOU Zhu-Ying1;SHI Li-Qun1;WANG Bao-Yi2;HAO Xiao-Peng2;ZHAO Guo-Qing1
1Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 2004332Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 1000493College of Physics Science and Technology, China University of Petroleum (East China), Dongying 257061
摘要Helium-containing Ti films are prepared using magnetron sputtering in the helium--argon atmosphere. Isochronal annealing at different temperatures for an hour is employed to reveal the behaviour of helium bubble growth. Ion beam analysis is used to measure the retained helium content. Helium can release largely when annealing above 970K. A thermal helium desorption spectroscopy system is constructed for assessment of the evolution of helium bubbles in the annealed samples by linear heating (0.4K/s) from room temperature to 1500K. Also, Doppler broadening measurements of positron annihilation radiation spectrum are performed by using changeable energy positron beam. Bubble coarsening evolves gradually below 680K, migration and coalescence of small bubbles dominates in the range of 680--970K, and the Ostwald ripening mechanism enlarges the bubbles with a massive elease above 970K.
Abstract：Helium-containing Ti films are prepared using magnetron sputtering in the helium--argon atmosphere. Isochronal annealing at different temperatures for an hour is employed to reveal the behaviour of helium bubble growth. Ion beam analysis is used to measure the retained helium content. Helium can release largely when annealing above 970K. A thermal helium desorption spectroscopy system is constructed for assessment of the evolution of helium bubbles in the annealed samples by linear heating (0.4K/s) from room temperature to 1500K. Also, Doppler broadening measurements of positron annihilation radiation spectrum are performed by using changeable energy positron beam. Bubble coarsening evolves gradually below 680K, migration and coalescence of small bubbles dominates in the range of 680--970K, and the Ostwald ripening mechanism enlarges the bubbles with a massive elease above 970K.
LIU Chao-Zhuo;ZHOU Zhu-Ying;SHI Li-Qun;WANG Bao-Yi;HAOXiao-Peng;ZHAO Guo-Qing. Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis[J]. 中国物理快报, 2007, 24(8): 2357-2360.
LIU Chao-Zhuo, ZHOU Zhu-Ying, SHI Li-Qun, WANG Bao-Yi, HAOXiao-Peng, ZHAO Guo-Qing. Annealing Behaviour of Helium Bubbles in Titanium Films by Thermal Desorption Spectroscopy and Positron Beam Analysis. Chin. Phys. Lett., 2007, 24(8): 2357-2360.
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