Development of the Technique for Fabricating Submicron Moire Gratings on Metal Materials Using Focused Ion Beam Milling
DU Hua1, XIE Hui-Min1, GUO Zhi-Qiang1, LUO Qiang2, GU Chang-Zhi2, QIANG Hai-Chang3, RONG Li-Jian3
1FML, Department of Engineering Mechanics, Tsinghua University, Beijing 1000842Institute of Physics, Chinese Academic of Sciences, Beijing 1000803Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016
Development of the Technique for Fabricating Submicron Moire Gratings on Metal Materials Using Focused Ion Beam Milling
DU Hua1;XIE Hui-Min1;GUO Zhi-Qiang1;LUO Qiang2;GU Chang-Zhi2;QIANG Hai-Chang3;RONG Li-Jian3
1FML, Department of Engineering Mechanics, Tsinghua University, Beijing 1000842Institute of Physics, Chinese Academic of Sciences, Beijing 1000803Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016
摘要A focused gallium ion (Ga+) beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy (SMA). The crossing type of gratings with double-frequency (2500l/mm and 5000l/mm) using the focused ion beam (FIB) milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy (SEM) Moire patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.
Abstract：A focused gallium ion (Ga+) beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy (SMA). The crossing type of gratings with double-frequency (2500l/mm and 5000l/mm) using the focused ion beam (FIB) milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy (SEM) Moire patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.
DU Hua;XIE Hui-Min;GUO Zhi-Qiang;LUO Qiang;GU Chang-Zhi;QIANG Hai-Chang;RONG Li-Jian. Development of the Technique for Fabricating Submicron Moire Gratings on Metal Materials Using Focused Ion Beam Milling[J]. 中国物理快报, 2007, 24(9): 2521-2524.
DU Hua, XIE Hui-Min, GUO Zhi-Qiang, LUO Qiang, GU Chang-Zhi, QIANG Hai-Chang, RONG Li-Jian. Development of the Technique for Fabricating Submicron Moire Gratings on Metal Materials Using Focused Ion Beam Milling. Chin. Phys. Lett., 2007, 24(9): 2521-2524.
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2007, Vol. 24 
