Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings
YAO Jian-Ke 1,2, JIN Yun-Xia1, ZHAO Yuan-An1, HE Hong-Bo1, SHAO Jian-Da1, FAN Zheng-Xiu1
1R&D Centre for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Graduate School, Chinese Academy of Sciences, Beijing 100080
Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings
YAO Jian-Ke 1,2;JIN Yun-Xia1;ZHAO Yuan-An1;HE Hong-Bo1;SHAO Jian-Da1;FAN Zheng-Xiu1
1R&D Centre for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Graduate School, Chinese Academy of Sciences, Beijing 100080
摘要We investigate the laser damage behaviour of an electron-beam-deposited TiO2 monolayer at different process parameters. The optical properties, chemical composition, surface defects, absorption and laser-induced damage threshold (LIDT) of films are measured. It is found that TiO2 films with the minimum absorption and the highest LIDT can be fabricated using a TiO2 starting material after annealing. LIDT is mainly related to absorption and is influenced by the non-stoichiometric defects for TiO2 films. Surface defects show no evident effects on LIDT in this experiment.
Abstract：We investigate the laser damage behaviour of an electron-beam-deposited TiO2 monolayer at different process parameters. The optical properties, chemical composition, surface defects, absorption and laser-induced damage threshold (LIDT) of films are measured. It is found that TiO2 films with the minimum absorption and the highest LIDT can be fabricated using a TiO2 starting material after annealing. LIDT is mainly related to absorption and is influenced by the non-stoichiometric defects for TiO2 films. Surface defects show no evident effects on LIDT in this experiment.
YAO Jian-Ke;JIN Yun-Xia;ZHAO Yuan-An;HE Hong-Bo;SHAO Jian-Da;FAN Zheng-Xiu. Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings[J]. 中国物理快报, 2007, 24(9): 2606-2608.
YAO Jian-Ke, JIN Yun-Xia, ZHAO Yuan-An, HE Hong-Bo, SHAO Jian-Da, FAN Zheng-Xiu. Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings. Chin. Phys. Lett., 2007, 24(9): 2606-2608.
[1] Maker P D 1964 Proceedings of the 3rd InternationalConference on Quantum Electronics (Dunod, Parwas, 1964.1.19-1964.1.23),pp 1559--1576 [2] Yao J K, Li H Y, Fan Z X, Tang Y X, Jin Y X, Zhao Y A, He H B andShao J D 2007 Chin. Phys. Lett. 24 1964 [3] Yao J K, Shao J D, He H B and Fan Z X 2007 Appl. Surf.Sci. (in press) [4] Yao J K, Fan Z X, Jin Y X, Zhao Y A, He H B and Shao J D 2007 Thin Solid Films (in press) [5] Yao J K, Shao J D, He H B and Fan Z X 2007 Vacuum 81 1023 [6] Albertinetti N and Minden H T 1996 Appl. Opt. 35 5620 [7] Chow R, Falabella S, Gary E L, Rainer F, Stolz C J and Kozlowski MR 1993 Appl. Opt. 32 5567 [8] Rao K N 2002 Opt. Eng. 41 2357 [9] Swanepoel R 1983 J. Phys. E: Sci. Instrum. 16 1214 [10] Hu H Y, Fan Z X and Zhao Q 2000 Laser Phys. 10 633 [11] ISO 11254-1:2000 Lasers and laser-related equipment: Determinationof laser-induced damage threshold of optical surfaces. Part 1: 1-on-1test
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