中国物理快报  2007, Vol. 24 Issue (10): 2830-2832    
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Fabrication of Nanoimprint Stamp Using Interference Lithography
CHEN Xian-Zhong, LI Hai-Ying
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209
Fabrication of Nanoimprint Stamp Using Interference Lithography
CHEN Xian-Zhong;LI Hai-Ying
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209