摘要Two-photon photopolymerization (TPP) of femtosecond laser is a promising method to fabricate three-dimensional woodpile photonic crystals (PCs). We build micro-fabrication system based on the principle of TPP. Three-dimensional woodpile PCs consisting of in-plane rod distances ranging from 1000nm to 2000nm are fabricated by focusing femtosecond laser in photosensitive liquid resin ORMOCER. The properties of the PCs are also discussed, and fundamental photonic band gaps in middle-infrared range are measured, whose in-plane rod distances are 1500nm and 2000nm. Three-dimensional woodpile PC devices with desired defects, such as cross-waveguide and micro-laser structures, are introduced easily by TPP. We fabricate the three-dimensional woodpile PCs in the liquid resin at the fast scanning speed of 120μm/s.
Abstract：Two-photon photopolymerization (TPP) of femtosecond laser is a promising method to fabricate three-dimensional woodpile photonic crystals (PCs). We build micro-fabrication system based on the principle of TPP. Three-dimensional woodpile PCs consisting of in-plane rod distances ranging from 1000nm to 2000nm are fabricated by focusing femtosecond laser in photosensitive liquid resin ORMOCER. The properties of the PCs are also discussed, and fundamental photonic band gaps in middle-infrared range are measured, whose in-plane rod distances are 1500nm and 2000nm. Three-dimensional woodpile PC devices with desired defects, such as cross-waveguide and micro-laser structures, are introduced easily by TPP. We fabricate the three-dimensional woodpile PCs in the liquid resin at the fast scanning speed of 120μm/s.
收稿日期: 2007-08-31
出版日期: 2007-10-23
引用本文:
ZHOU Ming;KONG Jun-Jie;YANG Hai-Feng;YAN Feng;CAI Lan. Rapid Fabrication of Three-Dimensional Woodpile Photonic Crystals by Means of Two-Photon Photopolymerization[J]. 中国物理快报, 2007, 24(11): 3164-3167.
ZHOU Ming, KONG Jun-Jie, YANG Hai-Feng, YAN Feng, CAI Lan. Rapid Fabrication of Three-Dimensional Woodpile Photonic Crystals by Means of Two-Photon Photopolymerization. Chin. Phys. Lett., 2007, 24(11): 3164-3167.
[1] Yablonovitch E 1987 Phys. Rev. Lett. 58 2059 [2] Lin S Y and Fleming J G 1998 Nature 394 251 [3] Yablonovitch E 1991 Phys. Rev. Lett. 67 2295 [4] Qi M, Lidorikis E and Rakich P T 2004 Nature 429 538 [5] Blanco A and Chomski E 2000 Nature 405 437 [6] Campbell M and Sharp D N 2000 Nature 404 53 [7] Deubel M and Freymann G V 2004 Nature 3 444 [8] Qiu J, Miura K and Hirao K 2004 SPIE 5350 1 [9] Jiang Z W, Yuan D J and Zhu A D 2003 Opt. Precision Engin. 11 234 [10] Sun H B, Matsuo S and Misawa H 1999 Appl. Phys. Lett. 74 786 [11] Miwa M, Juodkazis S, Kawakami T and Matsuo S 2001 Appl.Phys. A 73 561 [12] Straub M, Nguyen L H, Fazlic A and Gu M 2004 Opt. Mater. 27 359 [13] Guo R, Li Z, Jiang Z, Yuan D, Huang W and Xia A 2005 J.Opt. A 7 396 [14] Serbin J, Ovsianikov A and Chichkov B 2004 Opt. Exp. 12 5221 [15] Soljacic M and Joannopoulos J D 2004 Nature Materials 3 211 [16] Park H G, Kim S H and Kwon S H 2004 Science 305 1444 [17] Ogawa S, Imada M and Yoshimoto S 2004 Science 305 227
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