High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer
LU Xiu-qin, FU Chang-bo, LIANG Gang, GUO Ji-Yu, ZHAO Kui, LI Shu-yuan, LIU Jian-cheng, JIANG Hua, YANG Bing-fan
Department of Nuclear Physics, China Institute of Atomic Energy, Beijing 102413
High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer
LU Xiu-qin;FU Chang-bo;LIANG Gang;GUO Ji-Yu;ZHAO Kui;LI Shu-yuan;LIU Jian-cheng;JIANG Hua;YANG Bing-fan
Department of Nuclear Physics, China Institute of Atomic Energy, Beijing 102413
关键词 ：
25.70.Bc ,
29.30.Ep ,
68.55.Ln
Abstract ： Elastic recoil detection analysis technique with ΔE - E particle identification and Q3D momentum analysis has been developed to determine high resolution depth profiles in thin foils and multilayer systems. A depth resolution of 1.2nm was achieved at the surface of the samples using a high quality 100MeV 127 I beam. The method was applied to depth profile analysis of C/LiF multilayers, superconductor and GaN foil samples.
Key words ：
25.70.Bc
29.30.Ep
68.55.Ln
出版日期: 1999-07-01
:
25.70.Bc
(Elastic and quasielastic scattering)
29.30.Ep
(Charged-particle spectroscopy)
68.55.Ln
(Defects and impurities: doping, implantation, distribution, concentration, etc.)
引用本文:
LU Xiu-qin;FU Chang-bo;LIANG Gang;GUO Ji-Yu;ZHAO Kui;LI Shu-yuan;LIU Jian-cheng;JIANG Hua;YANG Bing-fan. High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer[J]. 中国物理快报, 1999, 16(7): 493-495.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1999/V16/I7/493
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