Calculation of Specific Heat for Aluminium Thin Films
LU Yao, SONG Qing-Lin, XIA Shan-Hong
State Key Laboratory of Transducer Technology and Institute of Electronics, Chinese Academy of Sciences,
PO Box 2652, Beijing 100080
Calculation of Specific Heat for Aluminium Thin Films
LU Yao;SONG Qing-Lin;XIA Shan-Hong
State Key Laboratory of Transducer Technology and Institute of Electronics, Chinese Academy of Sciences,
PO Box 2652, Beijing 100080
关键词 :
68.66.Jk ,
68.60.Dv
Abstract : We employ Prasher’s non-dimensional form to analyse the size effects on specific heat of Al thin films. Compared the calculation results of pure aluminium film with the experimental data, it is found that the reduction of phonon states is not the main reason of the size effect on the specific heat Al thin films with thickness from 10nm to 370nm. However, the Al thin film in air usually has an oxidation layer and the specific heat of the layer is smaller than Al. By including the contribution of the oxidation layer to the thin-film specific heat, the calculation results are much closer to the experimental data. This may be a possible reason of the size effects on specific heat of Al thin films.
Key words :
68.66.Jk
68.60.Dv
出版日期: 2005-09-01
引用本文:
LU Yao;SONG Qing-Lin;XIA Shan-Hong. Calculation of Specific Heat for Aluminium Thin Films[J]. 中国物理快报, 2005, 22(9): 2346-2348.
LU Yao, SONG Qing-Lin, XIA Shan-Hong. Calculation of Specific Heat for Aluminium Thin Films. Chin. Phys. Lett., 2005, 22(9): 2346-2348.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I9/2346
[1]
XIA Zhi-Lin;DENG De-Gang;FAN Zheng-Xiu;SHAO Jian-Da. Development in Laser Induced Extrinsic Absorption Damage Mechanism of Dielectric Films [J]. 中国物理快报, 2006, 23(8): 2179-2182.
[2]
ZHANG Zong-Zhi;ZHAO Hui;Cardoso S.;Freitas P. P.. Effect of Anti-Diffusion Oxide Layer on Enhanced Thermal Stability of Magnetic Tunnel Junctions [J]. 中国物理快报, 2006, 23(4): 932-935.
[3]
ZHANG Xing;ZHANG Qing-Guang;CAO Bing-Yang;FUJII Motoo;TAKAHASHI Koji;IKUTA Tatsuya. Experimental Studies on Thermal and Electrical Properties of Platinum Nanofilms [J]. 中国物理快报, 2006, 23(4): 936-938.
[4]
LI Lan;FU Li-Wei;YANG Rui-Xia;LI Guang-Min;TAO Yi;ZHANG Na;ZHANG Xiao-Song. Thermal Behaviour for InGaAsP/InP Multi-Quantum-Well Superluminescent Diodes [J]. 中国物理快报, 2005, 22(8): 2130-2132.
[5]
ZONG Fu-Jian;MA Hong-Lei;LIANG Wei;DU Wei;ZHANG Xi-Jian;XIAO Hong-Di;MA Jin;JI Feng;XUE Cheng-Shan;ZHUANG Hui-Zhao. Thermal Decomposition Behaviour of Zn3 N2 Powder [J]. 中国物理快报, 2005, 22(4): 907-910.
[6]
WANG Lin-Jun;XIA Yi-Ben;FANG Zhi-Jun;ZHANG Ming-Long;SHEN Hu-Jiang. Properties of Diamond Film/Alumina Composites for Integrated Circuits with Ultra-High Speed and High Power [J]. 中国物理快报, 2004, 21(6): 1161-1163.
[7]
HUANG Zheng-Xing;TANG Zhen-An;XU Zi-Qiang;DING Hai-Tao;GU Yu-Qin. In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique [J]. 中国物理快报, 2004, 21(4): 713-715.
[8]
AN Bing;ZHANG Tong-Jun;YUAN Chao;CUI Kun. Apparatus for Real-Time Measurement of Stress in Thin Films at
Elevated Temperatures [J]. 中国物理快报, 2003, 20(8): 1387-1389.
[9]
ZHANG Ning-Lin;SONG Zhi-Tang;SHEN Qin-Wo;LIN Cheng-Lu. Microstructural and Electrical Properties of ZrO2 Thin Films Prepared on Silicon on Insulator with Thin Top Silicon [J]. 中国物理快报, 2003, 20(2): 273-276.
[10]
GUO Deng-Zhu;HOU Shi-Min;SHEN Zi-Yong; ZHAO Xing-Yu;LIU Wei-Min;XUE Zeng-Quan. Preparation and Annealing-Induced Structural Transition of Self-Organized Nanostripes on the Electropolished Aluminum Surface [J]. 中国物理快报, 2002, 19(3): 385-388.
[11]
PU Lin;CHEN Zhi-Qiang;TAN Chao;YANG Zheng;ZOU Jian-Ping;BAO Xi-Mao;FENG Duan;SHI Yi;ZHENG You-Dou. Microstructural Models of Alumina Nanotubes and Anodic Porous Alumina Film Formed in Sulfuric Acid [J]. 中国物理快报, 2002, 19(3): 391-394.
[12]
LE Zi-chun;CAO Jian-lin;LIANG Jing-qiu;PEI Shu;YAO Jin-song;CUI Cheng-jia;LI Xing-lin. Stability of Mo/Si Multilayer Structure Used in Bragg-Fresnel Optics [J]. 中国物理快报, 1998, 15(7): 522-524.
[13]
CHEN Hong;ZHANG Ji-fa;CUI Jing-biao;FANG Rong-chuan*. Deposition of Diamond Film on Aluminum Nitride Ceramics and the
Study of Their Thermal Conductance [J]. 中国物理快报, 1996, 13(8): 625-628.
[14]
CHENG Degang;LÜFanxiu;SUN Qinbiao;YU Wenxiu;YANG Rang. Thermal Stability of Magnetron Sputtered Low Hydrogen
Content Diamondlike Carbon
[J]. 中国物理快报, 1994, 11(5): 285-288.