中国物理快报  1996, Vol. 13 Issue (2): 117-120    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
Model of Collisional Sheath in Spherical and Cylindrical Geometries for Plasma Source Ion Implantation
WANG De-zhen, YU Jiong, GONG Ye
The Key National Laboratory of Materials Modification by Three Beams, And Department of Physics, Dalian University of Technology, Dalian 116024
Model of Collisional Sheath in Spherical and Cylindrical Geometries for Plasma Source Ion Implantation
WANG De-zhen;YU Jiong;GONG Ye
The Key National Laboratory of Materials Modification by Three Beams, And Department of Physics, Dalian University of Technology, Dalian 116024