Abstract： Optical emission spectrum has been successfully measured on a hot filament diamond growth process with substrate biasing. The emission lines of atomic hydrogen, H2, CH and CH+ were observed. Effects of methane concentration on the emission intensity of observed lines were systematically studied. The experimental results suggest that atomic hydrogen and CH+ radicals play an important role in diamond growth, while CH radical facilitates the formation of amorphous carbon.
(Plasma diagnostic techniques and instrumentation)
引用本文:
CUI Jing-biao;FANG Rong-chuan. Emission Spectroscopy for Hot Filament Diamond Growth Process with Positive Substrate Biasing[J]. 中国物理快报, 1996, 13(3): 192-195.
CUI Jing-biao, FANG Rong-chuan. Emission Spectroscopy for Hot Filament Diamond Growth Process with Positive Substrate Biasing. Chin. Phys. Lett., 1996, 13(3): 192-195.
1996, Vol. 13 
