Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma
YANG Yun, WU Han-ming
Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080
Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma
YANG Yun;WU Han-ming
Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080
关键词 ：
52.25.Dg ,
52.50.Dg ,
52.65.-y
Abstract ： Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed.
Key words ：
52.25.Dg
52.50.Dg
52.65.-y
出版日期: 1996-06-01
引用本文:
YANG Yun;WU Han-ming. Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma[J]. 中国物理快报, 1996, 13(6): 447-450.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1996/V13/I6/447
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