Roles of Low Energy Electrons in the Fabrication Process Using Scanning Tunnelling Microscope
WANG Chen, BAI Chun-li, LI Xiao-dong1, SHANG Guang-yi, QIU Xiao-hui
Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080
1Permanent address: Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083
Roles of Low Energy Electrons in the Fabrication Process Using Scanning Tunnelling Microscope
WANG Chen;BAI Chun-li;LI Xiao-dong1;SHANG Guang-yi;QIU Xiao-hui
Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080
1Permanent address: Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083
Abstract： The effects of low energy electrons in scanning tunnelling microscope operations are explored, with the emphasis on its role in the fabrication processes. A simple model based on the continuum electron diffusion is proposed to account for the observed sub-surface characteristics of the nanoscale features. The results suggest that the local transport properties could affect the outcome of such operations.
(Field emission, ionization, evaporation, and desorption)
引用本文:
WANG Chen;BAI Chun-li;LI Xiao-dong;SHANG Guang-yi;QIU Xiao-hui. Roles of Low Energy Electrons in the Fabrication Process Using Scanning Tunnelling Microscope[J]. 中国物理快报, 1996, 13(10): 750-752.
WANG Chen, BAI Chun-li, LI Xiao-dong, SHANG Guang-yi, QIU Xiao-hui. Roles of Low Energy Electrons in the Fabrication Process Using Scanning Tunnelling Microscope. Chin. Phys. Lett., 1996, 13(10): 750-752.
1996, Vol. 13 
