Ion-Implanted Waveguides in a Nd3+-Doped Silicate Glass
LI Shi-Ling1, CHEN Feng1, WANG Xue-Lin1, FU Gang1, WANG Ke-Ming1,2, LU Qing-Ming3, LI Xi-Shan4, SHEN Ding-Yu5, MA Hong-Ji5, NIE Rui5
1Department of Physics, Shandong University, Jinan 250100
2State Key Laboratory of Crystal Materials, Shandong
University, Jinan 250100
3School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
4Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
5Department of Technical Physics and the Key Laboratory of Heavy Ion Physics (Ministry of Education), Peking University, Beijing 100871
Ion-Implanted Waveguides in a Nd3+-Doped Silicate Glass
1Department of Physics, Shandong University, Jinan 250100
2State Key Laboratory of Crystal Materials, Shandong
University, Jinan 250100
3School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
4Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
5Department of Technical Physics and the Key Laboratory of Heavy Ion Physics (Ministry of Education), Peking University, Beijing 100871
Abstract： Monomode enhanced-index Nd3+-doped silicate glass waveguides fabricated by ion implantation are reported. The Nd3+-doped silicate glass was implanted by 3.0 MeV B+ ions, 3.0 MeV O+ ions and 4.5 MeV Ni2+ ions, respectively. A prism-coupling method was carried out to measure dark modes in the Nd3+-doped silicate glass using a model 2010 prism coupler. The moving fibre method was applied to measure the waveguide propagation loss. After a moderate annealing, the 3.0-MeV B+-ion implanted waveguide loss is about 3.54 dB/cm; the 3.0-MeV O+-ion implanted waveguide loss is about 5.36 dB/cm; and the 4.5-MeV the Ni2+-implanted waveguide loss is about 7.55 dB/cm. The results show that with the increasing ion mass, the loss in implanted waveguide is increased.
LI Shi-Ling;CHEN Feng;WANG Xue-Lin;FU Gang;WANG Ke-Ming;LU Qing-Ming;LI Xi-Shan;SHEN Ding-Yu;MA Hong-Ji;NIE Rui. Ion-Implanted Waveguides in a Nd3+-Doped Silicate Glass[J]. 中国物理快报, 2003, 20(11): 1994-1996.
LI Shi-Ling, CHEN Feng, WANG Xue-Lin, FU Gang, WANG Ke-Ming, LU Qing-Ming, LI Xi-Shan, SHEN Ding-Yu, MA Hong-Ji, NIE Rui. Ion-Implanted Waveguides in a Nd3+-Doped Silicate Glass. Chin. Phys. Lett., 2003, 20(11): 1994-1996.
2003, Vol. 20 
