Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section
XIA Jin-Song, YU Jin-Zhong, FANZhong-Chao, WANG Zhang-Tao, CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section
XIA Jin-Song;YU Jin-Zhong;FANZhong-Chao;WANG Zhang-Tao;CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
关键词 ：
42.82.Et ,
42.82.Ds ,
42.82.-m
Abstract ： A 3-dB multimode interference optical coupler based on rib waveguides with trapezoidal cross section was designed and fabricated on silicon-on-insulator wafer. Potassium hydroxide (KOH) anisotropic chemical etching of silicon was used to fabricate the waveguides to obtain smooth interface. A modified finite-difference beam propagation method was used to simulate the multimode rib waveguide with slope interfaces. The rms roughness of etching interface is as small as 1.49 nm. The propagation loss of the waveguide is 1.3 dB/cm at wavelength of 1.55 μm. The fabricated 3-dB coupler has a good uniformity of 0.2 dB.
Key words ：
42.82.Et
42.82.Ds
42.82.-m
出版日期: 2004-01-01
:
42.82.Et
(Waveguides, couplers, and arrays)
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.-m
(Integrated optics)
引用本文:
XIA Jin-Song;YU Jin-Zhong;FANZhong-Chao;WANG Zhang-Tao;CHEN Shao-Wu. Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section[J]. 中国物理快报, 2004, 21(1): 104-106.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2004/V21/I1/104
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2004, Vol. 21 
