A New Method for Preparing Superconducting MgB2 Films from Diborane
WANG Dian-Sheng1,2, FU Xing-Hua1, ZHANG Zheng-Ping1,3, YANG Jian1
1Department of Physics, Guizhou University, Guiyang 550025
2Department of Applied Physics, University of Petroleum (East China), Shandong 257061
3Department of Information and Electronics, Zhejiang University, Hangzhou 310027
A New Method for Preparing Superconducting MgB2 Films from Diborane
WANG Dian-Sheng1,2;FU Xing-Hua1;ZHANG Zheng-Ping1,3;YANG Jian1
1Department of Physics, Guizhou University, Guiyang 550025
2Department of Applied Physics, University of Petroleum (East China), Shandong 257061
3Department of Information and Electronics, Zhejiang University, Hangzhou 310027
Abstract： We report on a new preparation method for magnesium diboride (MgB2) films by chemical vapor deposition (CVD) from diborane (B2H6). It is a two-step ex-situ approach, with the precursor boron films grown by CVD from B2H6 at 460°C, and followed by a post-annealing process in magnesium (Mg) vapor at 830°C. The prepared MgB2 thin films on Al2O3 polycrystalline substrates have an onset transition temperature of 35 K and zero-resistance temperature of about 24 K. Well-crystallized MgB2 grains were clearly observed in the SEM images and confirmed by x-ray diffraction analysis. The advantages of the proposed method are the feasibility to prepare large-area superconducting films and the compatibility with semiconductor technology.
WANG Dian-Sheng;FU Xing-Hua;ZHANG Zheng-Ping;YANG Jian. A New Method for Preparing Superconducting MgB2 Films from Diborane[J]. 中国物理快报, 2002, 19(8): 1179-1180.
WANG Dian-Sheng, FU Xing-Hua, ZHANG Zheng-Ping, YANG Jian. A New Method for Preparing Superconducting MgB2 Films from Diborane. Chin. Phys. Lett., 2002, 19(8): 1179-1180.
2002, Vol. 19 
