Improvement of Stress Anisotropy in Circular Planar Magnetron
Sputter Deposited Molybdenum Films with Annealing
WU Yong-Gang, GU Chun-Shi, CAO Er-Hua, WANG Zhan-Shan, WEI Jun-Ming, TANG Wei-Xing, CHEN Ling-Yan
Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092
Improvement of Stress Anisotropy in Circular Planar Magnetron
Sputter Deposited Molybdenum Films with Annealing
WU Yong-Gang;GU Chun-Shi;CAO Er-Hua;WANG Zhan-Shan;WEI Jun-Ming;TANG Wei-Xing;CHEN Ling-Yan
Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092
关键词 ：
68.55.Jk ,
81.40.Jj
Abstract ： As part of the programme to develop a free-standing thin-film filter for soft x-ray optics applications, stress anisotropy in molybdenum films deposited by dc circular planar magnetron sputtering has been studied by off-normal x-ray diffraction as a function of sputtering argon gas pressure over a range of 0.8-1.5 Pa. The stresses are found to be more compressive in the center area than in the edge area, and more compressive in the tangential direction than in the radial direction. The highest stress anisotropy exists in the film deposited at 1.5 Pa gas pressure. Annealing the films in vacuum is effective in reducing both the tensile stress and stress anisotropy in the tensile stressed films.
Key words ：
68.55.Jk
81.40.Jj
出版日期: 2002-07-01
引用本文:
WU Yong-Gang;GU Chun-Shi;CAO Er-Hua;WANG Zhan-Shan;WEI Jun-Ming;TANG Wei-Xing;CHEN Ling-Yan. Improvement of Stress Anisotropy in Circular Planar Magnetron
Sputter Deposited Molybdenum Films with Annealing[J]. 中国物理快报, 2002, 19(7): 964-966.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2002/V19/I7/964
[1]
SUN Xi-Lian;SHAO Jian-Da. Effect of Alumina and Chromium Interlayers on Microstructures and Optical Properties of Thin Ag Films on Glass Substrates
[2]
LIU Xi-Zhe;HUANG Zhen;LI Ke-Xin;LI Hong;LI Dong-Mei;CHEN Li-Quan;MENG Qing-Bo. Recombination Reduction in Dye-Sensitized Solar Cells by Screen-Printed TiO2 Underlayers
[3]
XU Wei-Wei;DAI Song-Yuan; HU Lin-Hua;LIANG Lin-Yun;WANG Kong-Jia. Influence of Yb-Doped Nanoporous TiO2 Films on Photovoltaic Performance of Dye-Sensitized Solar Cells
[4]
XU Chuan-Ming;SUN Yun;ZHOU Lin;LI Feng-Yan; ZHANG Li;XUE Yu-Ming;ZHOU Zhi-Qiang;HE Qing. Preparation of Cu(In,Ga)Se2 Thin Film Solar Cells by Selenization of Metallic Precursors in an Ar Atmosphere
[5]
WEI He-Lin;ZHANG Xi-Xiang;HUANG Han-Chen. Spontaneous Hillock Growth on Indium Film Surface
[6]
SUI Xiao-Hong;PEI Wei-Hua;ZHANG Ruo-Xin;LU Lin;CHEN Hong-Da. A Micromachined SiO2 /Silicon Probe for Neural Signal Recordings
[7]
SUN Jian;BAI Yi-Zhen;YANG Tian-Peng;XU Yi-Bin;WANG Xin-Sheng;DU Guo-Tong;WU Han-Hua. Deposition of ZnO Films on Freestanding CVD Thick Diamond Films
[8]
ZHANG Gu-Ling;WANG Jiu-Li;WU Xing-Fang;FENG Wen-Ran;CHEN Guang-Liang;GU Wei-Chao;NIU Er-Wu;FAN Song-Hua;LIU Chi-Zi;YANG Si-Ze. Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation
[9]
ZHANG Qin-Yuan; YANG Gang-Feng;JIANG Zhong-Hong;W. X. Que. Structural and Luminescence Properties of Transparent Nanocrystalline ZrO2 :Er3+ Films
[10]
AI Yu-Jie;XUE Cheng-Shan;SUN Li-Li;SUN Chuan-Wei;ZHUANG Hui-Zhao;WANG Fu-Xue;CHEN Jin-Hua;LI Hong. Fabrication of GaN Nanorods in a Large Scale on Si(111) Substrate by Ammoniating Technique
[11]
FEI Chun-Hong;PENG Zeng-Hui;LV Feng-Zhen;ZHANG Ling-Li;YAO Li-Shuang;XUAN Li. Effect of Molecular Weight on Liquid Crystal Photoalignment by Photosensitive Polyester Containing Thrifluoromethyl Moieties
[12]
HAO Wei-Chang;PAN Feng;WANG Tian-Min;ZHOU Chun-Lan;WEI Long. Self-Assembled TiO2 /PSS Multilayer Films Studied by Slow Positron Spectroscopy
[13]
SHANG Li-Yan;SHUI Jia-Peng;CAI Bin;CUI Ping. Reconsideration of Anelastic Relaxation Peaks in Pure Aluminium
[14]
LIANG Li-Min;FEI Guang-Tao;SHUI Jia-Peng;CUI Ping;WU Bing;CHEN Xiao-Ming;LUI Ke-Tao. High Precise Internal Friction Calculation for Force Vibration Mode
[15]
WANG Jian-Guo;SHAO Jian-Da;WANG Su-Mei;HE Hong-Bo;FAN Zheng-Xiu. Form Birefringence in Thin Films with Oblique Columnar Structures
2002, Vol. 19 
