Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB2 Multilayered Coatings
YANG Jin, ZHANG Xue-Hua, CAO Meng, WANG Ming-Xia, LIANG Jin-Ling, LI De-Jun
College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074
Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB2 Multilayered Coatings
YANG Jin;ZHANG Xue-Hua;CAO Meng;WANG Ming-Xia;LIANG Jin-Ling;LI De-Jun
College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074
关键词 ：
68.65.Ac ,
81.15.Cd ,
81.65.Lp ,
81.65.Lp
Abstract ： ZrC/ZrB2 multilayered coatings with bilayer periods of 3.5--40nm are synthesized by rf magnetron sputtering. Analyses of x-ray diffraction, scanning electron microscopy and nanoindentation indicate that multilayered coatings possess much higher hardness and greater fracture resistance than monolithic ZrC and ZrB2 coatings. A maximum hardness (41.7GPa) and a critical fracture load (73.7mN) are observed in the multilayer with La=32nm deposited at the substrate bias -40V. Higher residual stress built in the ZrC layer can be released by periodic insertion of ZrB2 into the ZrC layer. A clear multilayered structure with mixed ZrB2 (001), ZrB2 (002) and ZrC (111) orientations should be responsible for the enhanced mechanical properties.
Key words ：
68.65.Ac
81.15.Cd
81.65.Lp
81.65.Lp
出版日期: 2006-10-01
:
68.65.Ac
(Multilayers)
81.15.Cd
(Deposition by sputtering)
81.65.Lp
(Surface hardening: nitridation, carburization, carbonitridation ?)
81.65.Lp
(Surface hardening: nitridation, carburization, carbonitridation ?)
引用本文:
YANG Jin;ZHANG Xue-Hua;CAO Meng;WANG Ming-Xia;LIANG Jin-Ling;LI De-Jun. Effects of Processing Parameters on Microstructure and Properties of Nanoscale ZrC/ZrB2 Multilayered Coatings[J]. 中国物理快报, 2006, 23(10): 2838-2840.
2 Multilayered Coatings. Chin. Phys. Lett., 2006, 23(10): 2838-2840.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2006/V23/I10/2838
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2006, Vol. 23 
