Deposition of Diamond Film on Aluminum Nitride Ceramics and the
Study of Their Thermal Conductance
CHEN Hong, ZHANG Ji-fa, CUI Jing-biao, FANG Rong-chuan*
Department of Physics, * also Structure Research Laboratory, University of Science and Technology of China, Hefei 230026
Deposition of Diamond Film on Aluminum Nitride Ceramics and the
Study of Their Thermal Conductance
CHEN Hong;ZHANG Ji-fa;CUI Jing-biao;FANG Rong-chuan*
Department of Physics, * also Structure Research Laboratory, University of Science and Technology of China, Hefei 230026
关键词 ：
81.15.Gh ,
68.60.Dv
Abstract ： Diamond films (DF) have been deposited on AlN ceramic substrates by hot filament chemical vapour deposition method. The diamond nucleation on AlN ceramics has been investigated. A nucleation density more than 108 cm-2 was obtained on this kind of insulating polycrystalline substrate under common deposition conditions. The thermal conductance of the DF/AlN compound materials has been studied by photothermal deflection technique. The thermal diffusivity of the DF/AlN is higher than that of the AlN ceramics, and will increase as the diamond films grow thicker.
Key words ：
81.15.Gh
68.60.Dv
出版日期: 1996-08-01
:
81.15.Gh
(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
68.60.Dv
(Thermal stability; thermal effects)
引用本文:
CHEN Hong;ZHANG Ji-fa;CUI Jing-biao;FANG Rong-chuan*. Deposition of Diamond Film on Aluminum Nitride Ceramics and the
Study of Their Thermal Conductance[J]. 中国物理快报, 1996, 13(8): 625-628.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1996/V13/I8/625
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