Fabrication, Testing and Integration Technologies of Polymer Microlens for Pt/Si Schottky-Barrier Infrared Charge Coupled Device Applications
KE Cai-Jun1, YI Xin-Jian2, LAI Jian-Jun1, CHEN Si-Hai1
1Department of Optoelectronic Engineering, Huazhong University of Science and Technology, Wuhan 430074
2The State Laboratory for Image Processing and Intelligent Control, Huazhong University of Science and Technology, Wuhan 430074
Fabrication, Testing and Integration Technologies of Polymer Microlens for Pt/Si Schottky-Barrier Infrared Charge Coupled Device Applications
KE Cai-Jun1;YI Xin-Jian2;LAI Jian-Jun1;CHEN Si-Hai1
1Department of Optoelectronic Engineering, Huazhong University of Science and Technology, Wuhan 430074
2The State Laboratory for Image Processing and Intelligent Control, Huazhong University of Science and Technology, Wuhan 430074
Abstract： A novel polymer refractive microlens array has been formed on the surface of 256(V)×290(H) PtSi Schottky-barrier infrared charge coupled device (IRCCD) image sensors to improve the photoresponsivity of the IRCCD. The fabrication process flows of polymer microlens array are described. An effective aperture ratio in excess of 92% of microlens array has been achieved. An experimental facility to evaluate the optical performance of microlens array is introduced. The measurement results show that the microlens array indicates better than 4% non-uniformity of focal length and high optical performance. The application of the microlens array to improve the photosensitivity of infrared CCD is discussed.
2005, Vol. 22 
