1Department of Electronic Engineering, Microsystem Research Centre, Dalian University of Technology, Dalian 116024
2School of Mechanic Engineering, Dalian University of Technology, Dalian 116024
3Department of Mechanic Engineering, Tsinghua University, Beijing 100084
In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique
1Department of Electronic Engineering, Microsystem Research Centre, Dalian University of Technology, Dalian 116024
2School of Mechanic Engineering, Dalian University of Technology, Dalian 116024
3Department of Mechanic Engineering, Tsinghua University, Beijing 100084
Abstract：An advanced ac calorimetric method to measure thermal diffusivity of a thin sample is developed by using an optical reflectivity technique. A modulated infrared laser is used to heat the front surface of a foil specimen. The reflectivity of a continuous-wave He-Ne laser at the rear surface of the specimen is detected by a photoreceiver. According to the temperature dependence of reflectivity, the ac temperature response is obtained. Thermal diffusivity is deduced from a one-dimensional heat conduction equation. A stainless-steel foil and a copper foil are chosen as the samples. The present results agree well with the data in the literature.
HUANG Zheng-Xing;TANG Zhen-An;XU Zi-Qiang;DING Hai-Tao;GU Yu-Qin. In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique[J]. 中国物理快报, 2004, 21(4): 713-715.
HUANG Zheng-Xing, TANG Zhen-An, XU Zi-Qiang, DING Hai-Tao, GU Yu-Qin. In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique. Chin. Phys. Lett., 2004, 21(4): 713-715.
2004, Vol. 21 
