Effect of the Compressive Stress for the Growth of Cubic-BN Film
ZHAO Yong-nian1,2 , ZOU Guang-tian1 , HE Zhi1 , ZHAO Bing2 , WANG Bo1
1 State Key Laboratory for Superhard Materials, Jilin University, Changchun 130023
2 Key Laboratory for Supramolecular Structure and Spectroscopy, Jilin University, Changchun 130023
Effect of the Compressive Stress for the Growth of Cubic-BN Film
ZHAO Yong-nian1,2 ;ZOU Guang-tian1 ;HE Zhi1 ;ZHAO Bing2 ;WANG Bo1
1 State Key Laboratory for Superhard Materials, Jilin University, Changchun 130023
2 Key Laboratory for Supramolecular Structure and Spectroscopy, Jilin University, Changchun 130023
关键词 ：
81.15.Jj ,
81.15.Np ,
52.80.Vp
Abstract ： In this work, it is found that the compressive stress on the surface of cubic-BN (c-BN) film is all smaller than that inside c-BN film and after a longer period, the depositing matter mainly is of hexagonal-BN phase rather than c-BN phase, those just are the reason why a pure thicker c-BN film cannot, as yet, be obtained. Up to now the lowest IR peak position of 1004.7cm-1 detected from a broken and part delaminated c-BN film may be one close to the stressless c-BN.
Key words ：
81.15.Jj
81.15.Np
52.80.Vp
出版日期: 1998-08-01
:
81.15.Jj
(Ion and electron beam-assisted deposition; ion plating)
81.15.Np
(Solid phase epitaxy; growth from solid phases)
52.80.Vp
(Discharge in vacuum)
引用本文:
ZHAO Yong-nian;ZOU Guang-tian;HE Zhi;ZHAO Bing;WANG Bo. Effect of the Compressive Stress for the Growth of Cubic-BN Film[J]. 中国物理快报, 1998, 15(8): 615-616.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1998/V15/I8/615
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1998, Vol. 15 
