Cathodoluminescence of ZnO Films
FU Zhu-xi, GUO C hang-xin, LIN Bi-xia, LIAO Gui-hong
Department of Physics, University of Science and Technology of China, Hefei 230026
Cathodoluminescence of ZnO Films
FU Zhu-xi;GUO C hang-xin;LIN Bi-xia;LIAO Gui-hong
Department of Physics, University of Science and Technology of China, Hefei 230026
关键词 ：
78.60.Hk ,
78.66.Li ,
81.15.Cd
Abstract ： The cathodoluminescence of ZnO films deposited on Si substrates by reactive dc sputtering is investigated. Apart from the characteristic green emission band (522nm) of ZnO, an ultraviolet (392nm) band and a blue (430-460 nm) band have been observed. The x-ray diffraction and cathodoluminescent spectra reveal the dependences of the luminescence on the preparation conditions and crystallinity of the ZnO films.
Key words ：
78.60.Hk
78.66.Li
81.15.Cd
出版日期: 1998-06-01
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1998, Vol. 15 
