Investigation of Diamond Films Deposited on LaAIO3 Single Crystal Substrates by Hot Filament Chemical Vapor Deposition
SHANG Nai-gui1, FANG Rong-chuan1, HANG Yin3, LI Jin-qiu1, HAN Si-jin1, SHAO Qing-yi1, CUI Jing-biao1,2, XU Cun-yi2
1Department of Physics, 2Structure Research Laboratory, University of Science and Technology of China, Hefei 230026
3Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230026
Investigation of Diamond Films Deposited on LaAIO3 Single Crystal Substrates by Hot Filament Chemical Vapor Deposition
1Department of Physics, 2Structure Research Laboratory, University of Science and Technology of China, Hefei 230026
3Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230026
Abstract： Diamond nucleation and growth on a LaAIO3 single crystal substrate, whose lattice mismatch with diamond is only 7.2% at high temperature, were investigated for the first time. As an insulating substrate, a nucleation density of more than 108 cm-2 was achieved on ultrasonically cleaned wafers. A free-standing diamond film was obtained for 65 h growth and characterized by scanning electron microscopy, Raman and x-ray photoelectron spectroscopy. The results show that LaAIO3 single crystal is a good candidate substrate for diamond film growth.
(Composition, segregation; defects and impurities)
引用本文:
SHANG Nai-gui;FANG Rong-chuan;HANG Yin;LI Jin-qiu;HAN Si-jin;SHAO Qing-yi;CUI Jing-biao;XU Cun-yi. Investigation of Diamond Films Deposited on LaAIO3 Single Crystal Substrates by Hot Filament Chemical Vapor Deposition[J]. 中国物理快报, 1998, 15(2): 146-148.
SHANG Nai-gui, FANG Rong-chuan, HANG Yin, LI Jin-qiu, HAN Si-jin, SHAO Qing-yi, CUI Jing-biao, XU Cun-yi. Investigation of Diamond Films Deposited on LaAIO3 Single Crystal Substrates by Hot Filament Chemical Vapor Deposition. Chin. Phys. Lett., 1998, 15(2): 146-148.
1998, Vol. 15 
