Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope
JIANG Chang-Zhong1,2, P. Morin2, N. Rosenberg2
1Department of Physics, Wuhan University, Wuhan 430072
2Departement de Physique des Matériaux, Université Claude Bernard Lyon I, 69622 Villeurbanne Cedex, France
Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope
JIANG Chang-Zhong1,2;P. Morin2;N. Rosenberg2
1Department of Physics, Wuhan University, Wuhan 430072
2Departement de Physique des Matériaux, Université Claude Bernard Lyon I, 69622 Villeurbanne Cedex, France
Abstract： A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the backscattering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.
JIANG Chang-Zhong;P. Morin;N. Rosenberg. Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope[J]. 中国物理快报, 2000, 17(9): 637-639.
JIANG Chang-Zhong, P. Morin, N. Rosenberg. Energy Filtering and Coaxial Detection of the Backscattered Electrons in Scanning Electron Microscope. Chin. Phys. Lett., 2000, 17(9): 637-639.
2000, Vol. 17 
