Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa2Cu3O7-δ Thin Films
HU Wen-fei1,2, LI Lin1,2, WANG Tian-sheng1,3, LIU Wei2, TAO Hong-jie1,2, TIAN Yong-jun1,3, CHEN Ying-fei1,2
1National Laboratory for Superconductivity, 2Institute of Physics, Chinese Academy of Sciences, Beijing 100080
3Department of Material Science, Yanshan University, Qinhuangdao 066004
Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa2Cu3O7-δ Thin Films
HU Wen-fei1,2;LI Lin1,2;WANG Tian-sheng1,3;LIU Wei2;TAO Hong-jie1,2;TIAN Yong-jun1,3;CHEN Ying-fei1,2
1National Laboratory for Superconductivity, 2Institute of Physics, Chinese Academy of Sciences, Beijing 100080
3Department of Material Science, Yanshan University, Qinhuangdao 066004
Abstract： SrTiO3(001) vicinal substrates of miscut 1°, 3°, and 6° toward the (001) plane were annealed at 800-1000°C in pure flowing O2 for 6h and examined by atomic force microscopy. The high temperature annealed vicinal SiTiO3(001) displayed arrays of straight steps and smooth terraces. The step heights vary from about 2 to 6 unit cell depending on the annealing temperatures. At 1000°C, step bunching becomes obvious. The height steps of 1 unit cell are difficult to be observed by our atomic force microscopy. The YBa2Cu3O7-δ thin film grows epitaxially on the step-terrace surface with c-axis orientation by magnetron sputtering in the two-dimensional island mode. Prospect of step-flow growth is being discussed.
HU Wen-fei;LI Lin;WANG Tian-sheng;LIU Wei;TAO Hong-jie;TIAN Yong-jun;CHEN Ying-fei;. Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa2Cu3O7-δ Thin Films[J]. 中国物理快报, 1999, 16(11): 853-855.
HU Wen-fei, LI Lin, WANG Tian-sheng, LIU Wei, TAO Hong-jie, TIAN Yong-jun, CHEN Ying-fei,. Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa2Cu3O7-δ Thin Films. Chin. Phys. Lett., 1999, 16(11): 853-855.
1999, Vol. 16 
