Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses
YAO Dong-Sheng1,2, LIU Jing-Ru2, WANG Li-Ge2, YU Chang-Xuan1, ZHAN Ru-Juan1
1Department of Modern Physics, University of Science and Technology of China, HeFei 230026
2Third Division, Northwest Institute of Nuclear Technology, Xi’an 710024
Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses
YAO Dong-Sheng1,2;LIU Jing-Ru2;WANG Li-Ge2;YU Chang-Xuan1;ZHAN Ru-Juan1
1Department of Modern Physics, University of Science and Technology of China, HeFei 230026
2Third Division, Northwest Institute of Nuclear Technology, Xi’an 710024
Abstract： Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7eV and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The film microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600eV. The characteristics of DLC film deposition with fs pulses is discussed.
YAO Dong-Sheng;LIU Jing-Ru;WANG Li-Ge;YU Chang-Xuan;ZHAN Ru-Juan. Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses[J]. 中国物理快报, 2000, 17(7): 540-541.
YAO Dong-Sheng, LIU Jing-Ru, WANG Li-Ge, YU Chang-Xuan, ZHAN Ru-Juan. Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses. Chin. Phys. Lett., 2000, 17(7): 540-541.
2000, Vol. 17 
